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SemiChem APM
The SemiChem APM is the latest advanced process monitor from GMT, Inc. It represents the efforts from both customers and GMT, Inc. to create the most advanced SemiChem platform to date. The SemIChem APM offers the latest in technology, advanced user interface, enhanced communications, all while improving the SemiChem family’s unbeatable performance and reliability. Chosen time and again by the world’s leading technology companies, the SemiChem APM is the ultimate value in on-line process monitors.
Considerable attention is given to key components necessary for accurate, precise, and reliable measurements; repeatable reagent dispensing with digital burettes, reproducible sample volumes, and advanced operating software which optimizes all measurement parameters.
As a wet chemical monitoring system, the SemiChem APM automatically samples, analyzes, and reports chemical concentration of critical processes. The flexible nature of the SemiChem APM allows it to become the central component in any controlling scheme for either wet processing tools or their supporting blending and distribution system.
Fully configurable, the SemiChem APM can be tailored to match most any chemical monitoring challenge while recognizing budgetary constraints. This combination delivers maximum performance and value for engineers in all sorts of applications.
The SemiChem APM is used on nearly all wet chemical applications in the microelectronics environments, from cleaning, etching, lithography, CMP, metallization, and wastewater. In each application, the SemiChem APM offers exceptional performance.
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